KX310CR-MZ Series

KX310CR-MZ is a MEMS capacitive 3-axis accelerometer using Kionix™ Technology (Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer.). Acceleration ranges of ±2 g, ±4 g and ±8 g are supported. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element which further utilize common mode cancellation to decrease errors from process variation, temperature, and environmental stress.